Polishing machine HIT-18POAb-H2
HIT-18POAb-H2 is single side polishing machine with and high pressre correspondence mechanism.
By using airbag pressure mechanism, HIT-18POAb-H2 supply stable pressure and lapping.
This is rust proof mechanism so you can use silica and many chemical powders.
|Plate rotation speed||10-60rpm|
|shaft for process||2shaft Vacuum clamping|
|Press type||Airbag pressure mechanism|
|Maximum Pressure||10kg-100kg /1shaft|
|Process head rotation speed||0-100rpm|
|Force drive shaft||shaft force driven|
|Wafer installation type||Vacuum clamping|
|Planetary motion stroke||+/-35mm range 70mm|
|Planetary motion speed||1-30mm/sec|
|Operation panel||Hardware relay switch and LCD touch panel|
|Control type||Sequence control|
|Notes||rust proof mechanism|
*Specifications are subject to change without prior notice
Additional parts for HIT-18POAb-H2
- open type guide roller
- Available to rust proof mechanism